Target segments
Back-end final test
Wafer test
High performance
Handler and prober agnostic
1 to 4 handlers
Multi-site testing
Short test times
Pin electronics (voltage and current measurement on all pins simultaneously)
Maximum number of pins: (FT and AT/QT): 6 or 12 pins
High-quality diagnostics and calibration
High accuracy
User-definable parameters
Test heads
Current amplifier for fast leakage measurement
Short and open pins close to DUT
Dedicated test hardware
Embedded software
User-definable parameters
Visual ITEC: user-definable operator interface
Automatic multi-site expansion
Scope function
V and I waveforms and timing on all channels
Real-time diagnostics
Curve traces
Extendable software
Equipment control for multiple test cells
Post-processing
Dynamic Part Average Test
Static Part Average Test
Moving Limits
Nearest neighbourhood residual
Optional extension modules
Qs: reverse recovery charge (30 nC / 300 nC / 3 uC)
Gate resistance and capacitance (Rg/Cg) extension
µPHV: high voltage test (2 kV)
µPHC: high current unit (200 A)
µPDI: digital interface 2 x 16 channels fully floating
SECS/GEM interface